Basic Information |
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Product Name: | SILICON TETRAFLUORIDE |
CAS: | 7783-61-1 |
English Synonyms: | SILICON TETRAFLUORIDE ; TETRAFLUOROSILANE ; SILICON(IV)FLUORIDE ; SILICIUM TETRAFLUORIDE |
MDL Number.: | MFCD00040533 |
H bond acceptor: | 0 |
H bond donor: | 0 |
Smile: | F[Si](F)(F)F |
InChi: | InChI=1S/F4Si/c1-5(2,3)4 |
InChiKey: | InChIKey=ABTOQLMXBSRXSM-UHFFFAOYSA-N |
Property |
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Melting Point: | -90 DEG C(LIT) |
Boiling Point: | -86 DEG C(LIT) |
Density: | 3.57g/mLat25°C(lit.) |
Physical Property: | TRANSITION TEMPERATURE: CRITICAL TEMPERATURE -14.2 DEG C |
Comments: | APPLICATION: SILICON TETRAFLUORIDE IS USED IN ION-IMPLANTATION PROCESSES AND AS A PRECURSOR TO FLUORINATED SILICA VIA PLASMA-ASSISTED CVD. MIXTURES OF SIF4-SIH4-H2 HAVE RECENTLY BEEN USED TO DEPOSIT POLYCRYSTALLINE SILICON THIN FILMS VIA REMOTE PLASMA CHEMICAL VAPOR DEPOSITION (RPCVD) SUCH FLUORINATED THIN FILMS SHOW VISIBLE PHOTOLUMINESCENCE (PL) AT ROOM TEMPERATURE IMPURITIES: <0.5 PPM CARBON MONOXIDE (CO) IMPURITIES: <1 PPM ARGON AND OXYGEN (AR AND O2) IMPURITIES: <1 PPM CARBON DIOXIDE (CO2) IMPURITIES: <10 PPM METHANE (CH4) IMPURITIES: <3 PPM NITROGEN (N2) IMPURITIES: <50 PPM HYDROGEN FLUORIDE (HF) RECOMMENDED PRODUCTS: MONEL CONTROL VALVES Z261793, Z261807 OR MONEL GAS REGULATORS Z405981, Z406007 ARE RECOMMENDED RIDADR: UN 1859 2.3 RTECS: VW2327000 UNSPSC: 12142100 WGK: 3 |
Specification: | ELECTRONIC GRADE |
Safety information |
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Symbol: | GHS05 GHS06 |
Signal word: | Danger |
Hazard statements: | H300 +H310 + H330-H314 |
Precautionary statements: | P260-P264-P280-P284-P301 + P310-P302 + P350 |
hazard symbol: | T+ |
Risk Code: | R:14-26/27/28-31-34 |
Safe Code: | S:23-26-36/37/39-45 |
WGK Germany: | 3 |
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