TANTALUM(V) ETHOXIDE ,6074-84-6 _Chemical Cloud Database

TANTALUM(V) ETHOXIDE

Basic Information
Product Name：	TANTALUM(V) ETHOXIDE
CAS：	6074-84-6
English Synonyms：	TANTALUM(V) ETHOXIDE ; TANTALUM(V) ETHYLATE ; PET ; PENTAETHOXYTANTALUM ; PENTAETHYL TANTALATE ; TANTALUM ETHOXIDE ; TANTALUM PENTAETHOXIDE ; TANTALUM(V) ETHANOLATE
MDL Number.：	MFCD00049785
H bond acceptor：	5
H bond donor：	0
Smile：	CCO[Ta](OCC)(OCC)(OCC)OCC
InChi：	InChI=1S/5C2H5O.Ta/c51-2-3;/h52H2,1H3;/q5*-1;+5
InChiKey：	InChIKey=HSXKFDGTKKAEHL-UHFFFAOYSA-N
Property
Melting Point：	21 DEG C(LIT)
Boiling Point：	155 DEG C/0.01 MMHG(LIT)
Density：	1.566g/mLat25°C(lit.)
Physical Property：	FLASHPOINT: 29 DEG C FLASHPOINT: 84.2 DEG F REFRACTIVE INDEX: N20/D 1.487(LIT)
Comments：	APPLICATION: TANTALUM(V) ETHOXIDE PRECURSOR IS USED TO DEPOSIT ULTRA THIN FILMS OF TANTALUM OXIDE AND OTHER TANTALUM CONTAINING FILMS BY ATOMIC LAYER DEPOSITION AND CHEMICAL VAPOR DEPOSITION METHODS FORM: LIQUID WGK: 3
Safety information
Symbol：	GHS02 GHS05
Signal word：	Danger
Hazard statements：	H226-H314
Precautionary statements：	P280-P305 + P351 + P338-P310
hazard symbol：	C
Risk Code：	R:10-34
Safe Code：	S:16-26-36/37/39-45
WGK Germany：	1

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